-
- 犬飼 隆
- 日本電信電話公社茨城電気通信研究所
書誌事項
- タイトル別名
-
- Preparation of Ultra Fine SiC Powders by Plasma Gas Phase Reaction
- プラズマ キソウ ハンノウ ニヨル SiC チョウ ビリュウシ フンマツ ノ
この論文をさがす
抄録
SiC powders having ultrafine grain size were prepared from CH3SiCl3 by means of plasma gas phase reaction in Ar gas atmosphere. The reaction was taken place in an induction plasma torch with a double tube or a triple tube. Powders obtained contain β-SiC, a small fraction of 2H-SiC, and even Si when the triple tube torch was used. Average grain size of β-SiC powders depends on the structure of the torches, the flow rate of the raw material, and the deposition place. The average grain size of β-SiC powders deposited at the torch tube under the flow rate of 5×10-4 mol/min is about 200A, and increases with increase of the raw material flow rate.
収録刊行物
-
- 粉体および粉末冶金
-
粉体および粉末冶金 27 (8), 249-251, 1980
一般社団法人 粉体粉末冶金協会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390001206308907648
-
- NII論文ID
- 130000812332
-
- NII書誌ID
- AN00222724
-
- ISSN
- 18809014
- 05328799
-
- NDL書誌ID
- 2199020
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可