粉末冶金とレーザ加工の複合プロセスによるセラミックシート上への微細パターンの形成

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  • Micro Patterning on the Sheets of Ceramic Material by a Combined Process of Laser Machining and Powder Metallurgy
  • フンマツ ヤキン ト レーザ カコウ ノ フクゴウ プロセス ニ ヨル セラミックシート ジョウ エ ノ ビサイ パターン ノ ケイセイ

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This study aims at combining the laser micro machining technology with the powder metallurgy process for fabricating the ceramic sheets with a fine pattern on the surface. The ceramic sheets were so fragile after sintering that a compound material, a mixture of ceramic powder and polymer, was prepared for laser machining, followed by debinding and sintering. Yttria stabilized zirconia (YSZ) was employed as a starting material, considering that the obtained sheet could be applied for the electrolyte layer of the solid oxide fuel cell. Polyvinyl alcohol was also prepared as polymer binder for aqueous solution. The compound sheets were formed by laser irradiation varying such laser conditions as laser power and frequency to investigate the effect of the laser irradiation on the depth and width of the pattern. The laser-machined compound sheets were successfully debound and sintered, and dense ceramic sheets were finally obtained.

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