Fabrication of Micro Patterned Ceramic Structure by Imprinting Process
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- Xu Yang
- Dept. Intelligent Machinery and Systems, Graduate School of Kyushu University
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- Tsumori Fujio
- Dept. Mechanical Engineering, Kyushu University
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- Kang Hyungoo
- Dept. Mechanical Engineering, Kyushu University
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- Miura Hideshi
- Dept. Mechanical Engineering, Kyushu University
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抄録
In this report, an improved fabrication method of micro powder imprinting (μPI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8 μm were obtained on 300 μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.
収録刊行物
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- 粉体および粉末冶金
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粉体および粉末冶金 58 (11), 673-678, 2011
一般社団法人 粉体粉末冶金協会
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詳細情報 詳細情報について
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- CRID
- 1390001206311204096
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- NII論文ID
- 10030479483
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- NII書誌ID
- AN00222724
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- COI
- 1:CAS:528:DC%2BC3MXhsFKksLbE
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- ISSN
- 18809014
- 05328799
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- NDL書誌ID
- 023350089
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可