Active Microvibration Control of Precision Manufacturing Facilities with Smart Structure Using Piezoelectric Actuator.

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  • ピエゾアクチュエータを用いたスマート構造による精密生産施設のアクティブ微振動制振
  • ピエゾアクチュエータ オ モチイタ スマート コウゾウ ニ ヨル セイミツ セイサン シセツ ノ アクティブ ビシンドウ セイシン

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Abstract

A smart structure was tested for active microvibration control of a 2-story steel frame building model of a 5×3×4Hm outer size and a 2 500 kg total weight which was excited by ambient ground vibration. In the structure, piezoelectric actuators attached to the columns and the beams were used for the microvibration control by bending moment control of them. The controller was designed using the H ∞ control theory. The tests showed that the smart structure could effectively reduce the three-dimensional microvibration of the building model, and its applicability to floors and even entire buildings of semiconductor manufacturing factories having steel frame structures.

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