Holding Characteristics of Porous Vacuum Chucks (In the Case of Using Water-Impermeable Porous Film as Surface-Restricted Layer)

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  • 多孔質真空チャックの把持特性に関する研究（非透水性多孔質フィルムを表面目詰まり層として使用した場合）

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A porous vacuum chuck has an advantage that the flatness of an object held by this kind of chuck is superior to that by other types of vacuum chucks with vacuum holes or circumferential vacuum grooves. This is because porous material has through holes with micron-meter order diameter over a chuck surface. In addition, it is reported that a surface-restricted layer which has lower permeability than the bulk of the porous material can improve the holding characteristics, especially in the case of holding an object with smaller diameter than a porous chuck diameter. However, forming the surface-restricted layer is somewhat troublesome work. In addition, when a porous chuck is applied to machine tools, cutting fluid infiltrates a porous chuck and a holding force is decreased. Moreover, in cutting materials, a cutter also cuts the chuck surface and, accordingly, an air permeable sheet is usually inserted between an object and a chuck surfaces. Therefore, this paper proposes to use a water-impermeable porous film with 0.3 μm diameter holes as the surface restricted layer and the permeable sheet to overcome the above problems. The vertical and lateral holding forces are clarified numerically and experimentally. It was found that a water-impermeable porous film can easily form the surface-restricted layer for vacuum chucks and make it possible for vacuum chucks to apply to machine tools using cutting water.

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