陽電子消滅寿命法による膜構造評価

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Positron Annihilation Lifetime Technique as a Sensitive Nanoporosimetry for Membranes
ヨウデンシショウメツジュミョウホウニヨルマクコウゾウヒョウカ
Positron annihilation lifetime technique has been applied to exploring nanoscaled pores/holes in various materials. In recent years, with the help of a variable-energy positron beam it has emerged as a powerful tool for investigating functional thin films fabricated for separation membranes, low-k dielectrics, high performance gas sensors, and so on. This paper overviews briefly the principle of positron annihilation as well as recent progress in nanopore characterization of functional films by means of the positron annihilation lifetime technique.