Measurements of Electron Attenuation Length using Metallic Multilayers.

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Bibliographic Information

Other Title
  • 金属系多層膜を用いた電子の減衰長の測定

Description

We propose a new method for experimentally measuring the electron attenuation length in solid from Auger electron spectroscopic analysis on the aslant-smoothed surface of a metallic multilayer system. The demonstration is performed for the electrons with kinetic energies corresponding to Auger transitions using a ring pattern sputtered surface of Fe and Si02 multilayers. The obtained attenuation lengths are qualitatively in good agreement with the Seah-Dench formalism as well as the TPP-2 formalism for a kinetic energy region of 50 to 1600eV. The experimental values are quantitatively larger than the theoretical ones for Si02, but smaller than those for Fe.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 16 (8), 492-496, 1995

    The Surface Science Society of Japan

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