書誌事項
- タイトル別名
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- Fabrication of Photonic Crystals with Autocloning and Its Application to Optical Devices.
- 自己クローニング法によるフォトニック結晶の作製と光学デバイスへの応用
- ジコ クローニングホウ ニ ヨル フォトニック ケッショウ ノ サクセイ ト コウガク デバイス エ ノ オウヨウ
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抄録
We have proposed a method for fabricating photonic crystals, which is named autocloning. It is based on sputtering deposition and sputter etching. When we stack multilayer with the autocloning method on a substrate patterned periodically, we can preserve corrugated surface shape whose symmetry and periodicity reflect those of the substrate pattern. Consequently, we can realize the multi-dimensional structures automatically. Almost all the processes are carried out in a vacuum chamber without alignment process, accordingly the autocloning is simple, reliable, and suitable for mass-production. In this paper, we report the mechanisms of the autocloning and its applications to optical devices. Particularly, we describe the polarization splitters and the channel waveguides utilizing lattice modulation of the photonic crystals.
収録刊行物
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- 表面科学
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表面科学 22 (11), 723-728, 2001
公益社団法人 日本表面科学会
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詳細情報 詳細情報について
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- CRID
- 1390001206456497792
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- NII論文ID
- 10007485784
- 30036048036
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- NII書誌ID
- AN00334149
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- COI
- 1:CAS:528:DC%2BD38XotFWktw%3D%3D
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- ISSN
- 18814743
- 03885321
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- NDL書誌ID
- 5970408
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可