Quantitative X-ray Photoelectron Spectroscopy

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Bibliographic Information

Other Title
  • XPSの定量性

Description

X-ray photoelectron spectroscopy (XPS) is one of the effective tools for surface analysis. It has been said that basic principle of XPS is not so complicated, so the quantitativity is better than other methods like AES (Auger electron spectroscopy) or SIMS (secondary ion mass spectrometry). <BR>In this report the quantification by XPS and the limitations are briefly described.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 7 (3), 231-236, 1986

    The Surface Science Society of Japan

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