Spherical Aberration Correction in TEM

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  • 球面収差補正TEMを中心とする技術
  • キュウメン シュウサ ホセイ TEM オ チュウシン ト スル ギジュツ

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Abstract

Although developed to improve spatial resolution, a TEM spherical aberration corrector or ‘image corrector’ has the added benefit of eliminating the artifact of delocalization in HR-TEM imaging. This greatly increases the power of HRTEM imaging and is especially important for clear imaging of surfaces and interfaces. When such a corrector is combined with a source monochromator, ultra high resolution at low accelerating voltages also becomes feasible. These technologies can also be added to an environmental TEM (ETEM) to achieve unprecedented resolution on TEM samples in gaseous environments. Some recent results illustrating the power of image corrected TEM and how it is being used at the cutting edge of materials science are presented.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 34 (5), 234-239, 2013

    The Surface Science Society of Japan

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