Quantitative Chemical State Analysis of Tin Oxides (Sn, SnO, and SnO<sub>2</sub>) with High-Energy Resolution AES

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Other Title
  • 高エネルギー分解能AESによるSn，SnO，SnO<sub>2</sub>の化学状態定量分析
  • 高エネルギー分解能AESによるSn,SnO,SnO₂の化学状態定量分析
  • コウエネルギー ブンカイノウ AES ニ ヨル Sn,SnO,SnO ₂ ノ カガク ジョウタイ テイリョウ ブンセキ
  • Quantitative Chemical State Analysis of Tin Oxides (Sn, SnO, and SnO2) with High-Energy Resolution AES

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Description

The chemical state analysis of AES is, at present, performed only for some limited elements. This is because the peak broadness and the shape complexity of Auger spectra make it very difficult to identify the superimposed spectrum as each individual specific chemical state. In this report an advanced chemical state analysis of AES is proposed. This analysis is based on a file of standard spectra of elements with well-defined chemical states, the spectra of which are acquired with high energy resolution of AES. As an example, this method was applied to the depth profile of an tin oxide layer formed on a pure tin plate. The spectra of Sn MNN and O KLL were measured with an energy resolution of 0.1%. Every observed spectra of Sn MNN was separated to three oxidation sates: Sn4+, Sn2+ and Sn0, using the filed standard spectra of SnO2, SnO and Sn. Likewise, O KLL spectra was separated to two bonding state: O2- bonding to Sn2+ and O2- bonding to Sn4+. Moreover, we proposed new quantity method to estimate an atomic concentration depending on the chemical bonding state by comparison with the absolute intensity of the standard spectrum.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 33 (8), 431-436, 2012

    The Surface Science Society of Japan

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