Development of Combinatorial PLD-Surface Analysis System and Study of Nano-scale Controlled Epitaxial Anatase TiO2 Thin Film Surface

  • OHSAWA Takeo
    Materials and Structures Laboratory, Tokyo Institute of Technology
  • MATSUMOTO Yuji
    Frontier Collaborative Research Center Laboratory, Tokyo Institute of Technology
  • KOINUMA Hideomi
    Materials and Structures Laboratory, Tokyo Institute of Technology CREST-JST NIMS-COMET

Bibliographic Information

Other Title
  • 表面科学研究のコンビナトリアルケミストリー  コンビナトリアルPLD‐表面分析複合装置の開発とアナターゼTiO2エピタキシャル薄膜のナノスケール表面修飾

Abstract

We have developed a combinatorial pulsed laser deposition (PLD) combined with in-situ surface analysis techniques such as a scanning tunneling microscope (STM) and a low energy electron diffraction (LEED). Based on an atomically controlled PLD growth of an epitaxial anatase thin film, we have quickly screened transition metals of Ti to Cu deposited on the anatase TiO2(001) surfaces by combinatorial approach. The behavior of transition metals on the anatase could be well understood in terms of the relationship between oxide formation enthalpy and surface diffusivity for each transition metal. Furthermore, after such an intensive screening experiment, we successfully discovered a new surface reconstruction induced by an impurity of Cr diffused into the bulk. The advantage of the combinatorial approach for surface science study is discussed.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 25 (11), 678-683, 2004

    The Surface Science Society of Japan

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