Combinatorial Fabrications and Electronic-state Evaluations of Functional Complex Metal Oxides

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  • OHKUBO Isao
    Department of Applied Chemistry, School of Engineering, The University of Tokyo
  • ISHIHARA Toshihiro
    Department of Applied Chemistry, School of Engineering, The University of Tokyo
  • KITAMURA Miho
    Department of Applied Chemistry, School of Engineering, The University of Tokyo
  • OSHIMA Masaharu
    Department of Applied Chemistry, School of Engineering, The University of Tokyo Synchrotron Radiation Research Organization, The University of Tokyo

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Other Title
  • 機能性酸化物のコンビナトリアル薄膜の作製と電子状態解析
  • キノウセイ サンカブツ ノ コンビナトリアル ハクマク ノ サクセイ ト デンシ ジョウタイ カイセキ

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Abstract

We have developed a continuous composition spread-pulsed laser deposition (CCS-PLD) system of scanning laser for exploring new functional complex metal oxides. Our new CCS-PLD system is based on a precisely controlled synchronization between the laser firing, target exchange, linear mask motion and mirror swinging, and provides more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range by using scanning laser. In this study, we fabricated binary composition-spread films composed of LaNiO3 and LaMnO3. Synchrotron radiation-photoemission spectroscopy of LaNiO3-LaMnO3 composition spread films was carried out to evaluate the valence band electronic structures. Here we report on the high-throughput fabrications and evaluations using the combination of composition spread thin film growth techniques and synchrotron radiation-photoelectron spectroscopy.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 30 (1), 2-6, 2009

    The Surface Science Society of Japan

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