Recent Applications of Auger Electron Spectroscopy

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Other Title
  • オージェ電子分光法の最近の活用事例
  • オージェ電子分光法の最近の活用事例 : 絶縁物分析と化学状態分析
  • オージェ デンシ ブンコウホウ ノ サイキン ノ カツヨウ ジレイ : ゼツエンブツ ブンセキ ト カガク ジョウタイ ブンセキ
  • —絶縁物分析と化学状態分析—
  • —Non-Conductive Sample Analysis and Chemical State Analysis—

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Abstract

AES and XPS have been used to analyze the top surface of a solid sample for a long time. In late years scientific reports including an AES result became less than those of XPS year by year. It originates in superior several points of XPS; easy non-conductive sample analysis, quantitative analysis with higher accuracy, and excellent chemical state analysis. However, AES can acquire additional information from a minute area of a few tens of nm, which cannot be attainable by XPS. It was usually very important to understand a true sample surface condition more deeply. We have done lots of Auger applications for a long time, in order to extend AES capability to analyze many kinds of samples. In this report, we introduce recent applications of AES; non-conductive sample analysis and chemical state analysis. They are useful techniques and can be applied to many practical samples.

Journal

  • Hyomen Kagaku

    Hyomen Kagaku 37 (4), 156-161, 2016

    The Surface Science Society of Japan

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