四塩化珪素の水素還元法による高純度珪素製造の中間試験

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  • Semi-industrial experiment on the Production of High-purity Silicon by Hydrogen Reduction of Silicon Tetrachloride
  • 4エンカ ケイソ ノ スイソ カンゲンホウ ニ ヨル コウジュンド ケイソ セイゾウ ノ チュウカン シケン

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The fundamental studies on the hydrogen reduction of silicon tetrachloride have been already reported by the present authors. In this paper, the development of production of pure silicon to a semi-industrial scale based on the former studies is presented. Some data on the procedure of this production are also given, namely, the amount of silicon deposition, yield of production, mixing ratio of reaction gas as well as the flow rate of hydrogen. Further, the shape and the aggregate state of silicon crystal are observed. The high-purity silicon prepared by this method is expected to be usable as semiconductor material.

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