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- 天野 真央
- Department of Applied Science, Graduate School of Engineering, Tokai University
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- 江崎 祐美子
- Department of Applied Science, Graduate School of Engineering, Tokai University
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- ストリスナ カデック フェンディ
- Department of Applied Science, Graduate School of Engineering, Tokai University
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- 松村 義人
- Department of Applied Science, Graduate School of Engineering, Tokai University
書誌事項
- タイトル別名
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- Preparation of Supersaturated Fe-In Alloy Thin Films by Ion-Plating Process
- イオンプレーティングホウ ニ ヨル Fe-In カホウワコヨウタイ ハクマク ノ サクセイ
この論文をさがす
抄録
In this study, Fe-In (Fe-IIIB system) alloys of ferromagnetic thin films with supersaturated indium concentration were prepared by a triode-type ion-plating process with dual vapor sources. The preparation of the supersaturated Fe-In thin films was discussed on the basis of the effects of excess energy on the nanostructure of thin films. The kinetic energy of ions and the ionization rate in evaporation particles were measured using a Langmuir probe and a Faraday cup respectively. The excess energy of IP process increased with increasing applied bias voltage of discharge electrode. In X-ray diffraction analysis, crystal structures of supersaturated film samples were shown to be α-Fe bcc structures of Fe solid solution alloy. The ion-plating process can control the solubility limit and nanostructure of Fe alloy thin films.<br>
収録刊行物
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- 日本金属学会誌
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日本金属学会誌 77 (5), 174-176, 2013
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390001206482590592
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- NII論文ID
- 10031168440
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- NII書誌ID
- AN00187860
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- COI
- 1:CAS:528:DC%2BC3sXpvV2gtLg%3D
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- ISSN
- 18806880
- 24337501
- 00214876
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- NDL書誌ID
- 024655026
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可