The Precipitation Behavior of TiC and TiN on the Surface of SUS 304 and Fe Implanted with Ti<SUP>+</SUP>

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  • Ti<SUP>+</SUP>イオン注入したSUS 304ステンレス鋼と純鉄におけるTiCとTiNの析出挙動
  • Ti+イオン注入したSUS304ステンレス鋼と純鉄におけるTiCとTiNの析出挙動
  • Ti + イオン チュウニュウシタ SUS304 ステンレス コウ ト ジュン

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Abstract

SUS 304 stainless steel and Fe were implanted with 1×1017 Ti+/cm2 at room temperature. The surface composition of implanted SUS 304 and Fe at high temperatures was observed in vacuum with AES and XPS.<BR>The precipitation of Ti compounds was found on the surfaces of implanted SUS 304 and Fe. Implanted Ti+ into SUS 304 and Fe, which existed near the surfaces of metals, diffused into the inside of the surfaces and reacted on C and N in metals. At about 600 K, TiC precipitated on the surfaces of both SUS 304 and Fe. The precipitated TiC disappeared at about 1100 K and TiN precipitated on the surface of SUS 304, while on the surface of Fe this change was observed at about 750 K.<BR>The surface precipitation behavior is explained as follows: As TiN is thermodynamically more stable than TiC, the latter reacts on N which diffuses from the bulk of metal, and changes into TiN. The diffusion coefficient of N in Fe is larger than that of N in SUS 304. Therefore, the precipitation temperature of TiN on the surface of Fe is lower than on that of SUS 304.<BR>This precipitation behavior can be applied to the surface treatment of various metals.

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