トリイソブチルアルミニウムを用いた減圧CVD法によるピッチ系炭素繊維上へのAl薄膜の形成

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タイトル別名
  • Formation of Al Films on Pitch-base Carbon Fibers from Tri-iso-butyl Aluminum by the Reduced-pressure CVD
  • トリイソブチル アルミニウム オ モチイタ ゲンアツ CVDホウ ニ ヨル ピ

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Thermal deposition of Al on high modulus pitch-base carbon fiber tows from the tri-iso-butyl aluminum has been studied. The method carried out in the range from 523 to 673 K seems to be superior to other methods, for example, vacuum evaporation, sputtered deposition or electrodeposition and so on, from the view of throwing power, which is the penetrability of the source into the middle of the tows. The purpose of this study is to coat the fiber with Al uniformly and minutely without degradating the fiber and to provide a preform of carbon fiber-Al composites.<BR>In this paper, we have described the effects of the vaporization temperature of the source (Tv) and the deposition temperature (Td) on the microstructure of the deposited aluminum. Moreover, the degradation of the fiber by the process has been estimated. In the experiment the total gas pressure (Pt) and the gas flow rate of Ar and isobutylene gas have been kept at 1333 Pa and a constant, respectively.<BR>As a result, the optimum Tv has been between 333 K and 363 K. Then the pretty white silver Al deposits have been obtained at the Td from 533 K to 583 K. But at 603 K and above, the color of the deposits has become darker slightly. In the deposits relatively larger amounts of carbon and oxygen have been contained. The optimum Td has seemed to be below 583 K.<BR>From the tensile testing, we have estimated the degradation of the coated fibers; non-coated fibers and Al deposited ones have given almost the same strength. Hence it has been obvious that the coated fibers have never been weaken by this CVD process.

収録刊行物

  • 日本金属学会誌

    日本金属学会誌 51 (6), 577-583, 1987

    公益社団法人 日本金属学会

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