窒素含有アルゴン雰囲気で作製したFe-Ta-Cスパッタ薄膜の磁気特性および耐食性

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タイトル別名
  • Magnetic Properties and Corrosion Resistance of Fe-Ta-C Sputtered Thin Films Prepared under Argon Atmosphere Containing Nitrogen Gas
  • チッソ ガンユウ アルゴン フンイキ デ サクセイシタ Fe-Ta-C スパッ

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抄録

The magnetic properties, the thermal stability, and the corrosion resistance of Fe-Ta-C thin films prepared in an atomsphere containing N2 were studied. As the N2 content in the sputtering gas is increased, Bs and μ decrease, while Hc and λs increase. A film prepared in Ar+N2 (1.5 vol%) has Bs of about 1.4 T, and μ (at 1 MHz) higher than 2000. A film prepared in Ar+N2 (2 vol%) has Hc of 80 A/m, and λs of 1.4×10−6. Fe-Ta-C thin films produced in an atomsphere containing N2 have a high thermal reliability. After thermal treatment at 873 K, the soft magnetic properties of Fe-Ta-C thin film produced in the atomsphere containing N2 did not change, while that of Fe-Ta-C thin film produced in pure Ar atomsphere changed, namely, Hc increased and μ decreased.<BR>The corrosion resistance was measured by change of Bs. The value of Bs of the Fe-Ta-C thin film prepared in an atomsphere containning N2 did not change after being immersed in pure water for 3.96×105 s. Furthermore, this film has a high corrosion resistance in pure water with Ar bubbling for 1800 s. However, Bs of Fe-Ta-C thin film prepared in pure Ar atomsphere decreased to 65% of the initial value. After immersing the Fe-Ta-C thin film prepared in Ar+N2 (0.5 vol%) in 0.01 N NaClaq for 3.96×105 s, Bs decreased to 75% of the initial value, while in the case of Fe-Ta-C thin film prepared in Ar+N2 (5 vol%), Bs decreased to 95% of the initial Bs.

収録刊行物

  • 日本金属学会誌

    日本金属学会誌 61 (4), 358-365, 1997

    公益社団法人 日本金属学会

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