イオン密度計測のための四重極型質量分析器の感度係数測定

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タイトル別名
  • Sensitivity determination of quadrupole mass spectrometer for ion density measurement.
  • イオン密度計測のための4重極型質量分析器の感度係数測定
  • イオン ミツド ケイソク ノ タメ ノ 4ジュウキョクガタ シツリョウ ブンセ

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抄録

A sensitivity determination method for a quadrupole mass spectrometer using an electron impact ionization process was investigated to determine ion density from observed ion current. Theoretical expression of the relation among measured ion current, irradiated electron beam current and electron energy was obtained, in which direct ionization was assumed. Sensitivity was determined as a fitting factor of the calculated value to the measured ion current by the least square method.<br>Sensitivity was measured for argon under the condition that ionization processes except direct ionization were negligible. The dependence of measured ion current on the irradiated electron energy and current agreed with the theoretical prediction and the sensitivity was determined with an uncertainty of 6%. The same measurement was performed for uranium and the sensitivity was successfully determined.

収録刊行物

  • 質量分析

    質量分析 38 (4), 175-181, 1990

    一般社団法人 日本質量分析学会

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