書誌事項
- タイトル別名
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- SIMS Applications for Electronic Materials.
- SIMS ノ デンシ ザイリョウ エ ノ オウヨウ
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Current problems and applications of SIMS analysis for electronic materials, especially for semiconductors are discussed from the viewpoint of in-depth profile, micro area and trace analysis and quantification. Static-SIMS and SNMS which are presently being developed as new analytical techniques are also reviewed and those applications for semiconductor materials are shown.
収録刊行物
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- 質量分析
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質量分析 45 (2), 187-199, 1997
一般社団法人 日本質量分析学会
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詳細情報 詳細情報について
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- CRID
- 1390001206493885952
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- NII論文ID
- 10016281022
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- NII書誌ID
- AN0010555X
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- ISSN
- 05428645
- 18804225
- 18843271
- 13408097
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- COI
- 1:CAS:528:DyaK2sXjs1Gjurs%3D
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- NDL書誌ID
- 4184856
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可