On the Emission of Secondary Ions during Oxygen Ion Bombardment

DOI Web Site Web Site

Bibliographic Information

Other Title
  • 酸素イオン照射時の二次イオン生成過程について
  • サンソ イオン ショウシャジ ノ ニジ イオン セイセイ カテイ ニ ツイテ

Search this article

Abstract

A simple physical model is proposed for the process of positive ion emission during oxygen ion bombardment of a solid sample. The incident ions are assumed to develop the oxygen enhanced layer at the surface of target and give rise to the emission of diatomic molecules.These clusters of atoms tend to dissociate into atoms and/or emit electrons produce atomic and molecular ions during the process of sputtering.Expressions are given for the relative intensities of ions and are compared successfully with experimental data.

Journal

Details 詳細情報について

Report a problem

Back to top