質量分離器によるイオン注入に伴なう固体表面発光に関する研究:可視部スペクトルを中心として

DOI Web Site Web Site

書誌事項

タイトル別名
  • Studies on the Luminescence of Solid Surfaces Accompanied by Ion Implantation Using an Isotope Separator: Measurement in a Visible Region
  • シツリョウ ブンリキ ニヨル イオン チュウニュウ ニ トモナウ コタイ ヒョ

この論文をさがす

抄録

Luminescence caused by bombardment of ions Cl+, In+, InCl+ and InCl2+ on Al, graphite, phthalocyanine, Cu and Fe was studied under ion acceleration of 20keV. This phenomenon is considered to be closely related to the processes occurring in ion implantation.<BR>The luminescence consists of atomic spectra originated from the target atoms and the projectile ions, and it also shows characteristic increase of base line intensity at the same regions of wave length for all the targets used in the experiments.<BR>It is found that all the components of the spectra in the same target are similar for various ions, while the intensity distribution of the spectra of optical emission in ion implantation differs from that in spark and arc sources.

収録刊行物

  • 質量分析

    質量分析 27 (3), 163-172, 1979

    一般社団法人 日本質量分析学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ