Synthesis of Aligned Single-Walled Carbon Nanotubes by Point-Arc Microwave Plasma Chemical Vapor Deposition

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  • プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題　　４．先端放電型マイクロ波プラズマＣＶＤによる単層カーボンナノチューブ配向成長
  • 先端放電型マイクロ波プラズマCVDによる単層カーボンナノチューブ配向成長
  • センタン ホウデンガタ マイクロハ プラズマ CVD ニ ヨル タンソウ カーボンナノチューブハイコウ セイチョウ

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It is very important to control the growth orientation of carbon nanotubes (CNTs) on substrates for applications such as field emission devices and CNT-based FETs. Although chemical vapor deposition (CVD) is the most reliable means to this end, there have been few reports on the synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) using the CVD method. In this study, we demonstrate the low temperature synthesis of extremelydense and vertically aligned SWNTs deposited by point-arc microwave plasma CVD.

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