Application of Micromachining Technology for Spectroscopy

DOI
  • IWAOKA Hideto
    Yokogawa Electric Corporation, Corporate R & D The Society of Instrument and Control Engineers
  • HARA Hitoshi
    Yokogawa Electric Corporation, Corporate R & D The Society of Instrument and Control Engineers
  • WATANABE Tetsuya
    Yokogawa Electric Corporation, Corporate R & D The Society of Instrument and Control Engineers

Bibliographic Information

Other Title
  • マイクロマシン　　実用化とナノ領域への展開　　分光分析への応用

Journal

Keywords

Details 詳細情報について

  • CRID
    1390001206516719872
  • NII Article ID
    130003697729
  • DOI
    10.11499/sicejl1962.42.52
  • ISSN
    18838170
    04534662
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles

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