Micro/Nanomachining by Combined Process

DOI Web Site 1 Citations 37 References
  • ONO Takahito
    Graduate school of Engineering, Tohoku University
  • TANAKA Shuji
    Graduate school of Engineering, Tohoku University
  • ABE Takashi
    Graduate school of Engineering, Tohoku University
  • ESASHI Masayoshi
    New Industry Creation Hatchery Center, Tohoku University The Society of Instrument and Control Engineers

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  • マイクロマシン　　実用化とナノ領域への展開　　複合プロセスによるマイクロ・ナノマシニング
  • カイセツ フクゴウ プロセス ニ ヨル マイクロ ナノマシニング

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