Plasma polymerization of hexafluoroethane.

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Other Title
  • ヘキサフルオロエタンのプラズマ重合
  • ヘキサフルオロエタン ノ プラズマ ジュウゴウ

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Description

Plasma polymerization of hexafluoroethane (C2F6) has been examined. Fluorine-containing thin films were obtained from C2F6 without addition of any hydrogen or hydrocarbons. IR and XPS analysis indicated that the main feature of the plasma polymers was a linear -CF2CF2- structure. They contained considerable amounts of branched groups. It was thought that the plasma polymers included low molecular weight components because significant quantities of the polymers were soluble in organic solvents. Molecular weights of plasma polymers were measured by GPC. With increasing RF power, fluorine content of the plasma polymers increased, and both the ratio of branched structures and the molecular weight decreased. The increase in amounts of atomic fluorine detached from C2F6 resulted in decomposition and fluorination of the plasma polymer.

Journal

  • KOBUNSHI RONBUNSHU

    KOBUNSHI RONBUNSHU 47 (7), 549-552, 1990

    The Society of Polymer Science, Japan

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