小型高輝度Ｘ線発生装置を用いた薄膜Ｘ線回折装置の開発
書誌事項
- タイトル別名
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- Development of an X-Ray Diffractometer for Thin Film Analyses Applying a Compact X-ray Generator with High Loaded Power Rate to a Small Focus.
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説明
An X-ray diffractometer newly designed for thin film analyses is consisted of a compact X-ray generator with high loaded power rate to a small focus, a curved position sensitive detector and K-axis type 4-circle goniometer. The diffractometer enables measurements of thin film samples for electronic devices, e.g. rapid pole figure measurements of thin film samples and depth-sensitive measurements of multilayer thin films. A preffered orientation analysis of Co-Nb-Zr films for VTR core and a crystallinity analysis of multilayer films for circuit board were performed by using this apparatus.
収録刊行物
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- 鉱物学雜誌
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鉱物学雜誌 23 (1), 27-31, 1994
一般社団法人 日本鉱物科学会
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詳細情報 詳細情報について
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- CRID
- 1390001206525510528
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- NII論文ID
- 130003623793
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- ISSN
- 18837018
- 04541146
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可