Study on Flow and Diffusion Field of Clean Room with Locally Air-balanced Supply-exhaust Ventilation System installed at Ceiling : Part 1-Flow Visualization with Laser Light Sheet and Measurement of Flow Characteristics

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  • MURAKAMI Shuzo
    Institute of Industrial Science, Univ. of Tokyo
  • KATO Shinsuke
    Institute of Industrial Science, Univ. of Tokyo
  • TANAKA Yukihiko
    (Present office)Technical Research Institute, Fujita Corporation:Institute of Industrial Science, Univ. of Tokyo
  • NAGANO Shin-ichiro
    (Present office)Technical Research Institute, Fujita Corporation:Institute of Industrial Science, Univ. of Tokyo
  • CHIRIFU Satoru
    (Present office)Takasago Thermal Engineering Co., Ltd.:Institute of Industrial Science, Univ. of Tokyo

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Other Title
  • 天井面給排気による局所流量バランス方式クリーンルームに関する研究 : 第1報-模型実験による流れ場・拡散場の検討
  • 天井面給排気による局所流量バランス方式クリーンルームに関する研究-1-模型実験による流れ場・拡散場の検討
  • テンジョウメン キュウハイキ ニ ヨル キョクショ リュウリョウ バランス ホ

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Abstract

In this paper, from the viewpoint of contamination control, a clean room with locally air-balanced supply-exhaust ventilation system installed at ceiling is studied. Flow and diffusion fields in this room are analyzed by both flow visualization and measurement. The results obtained from model experiments of this system are compared with those of conventional flow type clean room with exhaust openings at the wall. The flowfields of the former are characterized by the inflow jet and the rising streams around it, which are almost the same with those of the latter. The combination of one jet and the rising streams around it forms a "flow unit". The total flowfields are regarded as the combination of these flow units. In the total flowfield, we can allot each exhaust opening to the corresponding flow unit so as to make it in the condition of closed airflow within each flow unit. This situation is mainly possible by arranging exhaust opening at the ceiling. In this flowfield contaminant diffusion in the room is almost confined to only one flow unit. It is confirmed by the model experiment that the locally closed circuit ventilation system arranging supply and exhaust openings at ceiling is useful method for contamination control.

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