Ultraprecision Surface Profile Measurement by Laser

DOI

Bibliographic Information

Other Title
  • レーザによる超精密形状測定
  • レーザー ニ ヨル チョウ セイミツ ケイジョウ ソクテイ

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Abstract

An ultraprecision surface profile measuring instrument for measuring surface roughness, microangle, profile or the like has been put to practical use as an on-line measuring instrument for a production line.This instrument is based on the principle of optical-heterodyne interferometry using a laser and an acousto-optic device. The resolutions of surface. roughness and microangle are on the order of 0.001μm and 0.001°, respectively. This instrument is scarcely affectcld by the influences of vibration and reflection factor of the sample surface. Therefore, stable measurements can be made, and surf ace profiles can be obtained by an easy data processing method.

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Details

  • CRID
    1390001206570706048
  • NII Article ID
    110002776232
  • NII Book ID
    AN00195723
  • DOI
    10.20805/tokeieafj.116.0_1
  • ISSN
    24321915
    00290416
  • NDL BIB ID
    3063481
  • Text Lang
    ja
  • Data Source
    • JaLC
    • NDL
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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