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- 板生 清
- 東京大学
書誌事項
- タイトル別名
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- A Micro-Energy Flow of a Microcantilever
- マイクロ シンドウシ ニ オケル ビショウ エネルギーフローノ ケンキュウ
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説明
From the viewpoint of a micro energy flow, the microsystems design method is investigated for the microactuators and sensors. A simple microsystem is developed as our model, which is excited photothermally by the light from high power laser diode. The exciting point to vibrate a cantilever at maximum amplitude is obtained near the clamped position, which means the maximum efficiency of energy transmission. The energy dissipation characteristics of the cantilever is analytically evaluated. The quantities of dissipation caused by airflow force, internal friction and support loss are calculated and comparedith with experimental results. As a results, micro energy input position and the relationship between microbeam size and dissipation ratio are evaluated, which makes progress in a design method of the microsystems excited by a wireless energy supply.
収録刊行物
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- 日本時計学会誌
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日本時計学会誌 157 (0), 15-21, 1996
一般社団法人 日本時計学会
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詳細情報 詳細情報について
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- CRID
- 1390001206572263296
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- NII論文ID
- 110002776001
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- NII書誌ID
- AN00195723
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- ISSN
- 24321915
- 00290416
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- NDL書誌ID
- 3994476
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDLサーチ
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可