Mechanical property measurements on nanoscale

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Other Title
  • ナノ領域の力学特性計測
  • ナノ リョウイキ ノ リキガク トクセイ ケイソク

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Abstract

<p>With the popularization of nanotechnology, mechanical property measurements on the nanoscale have gained much attention. In this article, I describe the principle of various measurements in acoustic force microscopy, which has been developed for this purpose. Then I show applications of the acoustic force microscopy to subsurface defect evaluation in microdevices and the mechanical property characterization of ferroelectric domains.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 76 (7), 751-757, 2007-07-10

    The Japan Society of Applied Physics

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