A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption
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- Yamazaki Hiroaki
- Corporate Research & Development Centor, Toshiba Corporation
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- Hayashi Yumi
- Corporate Research & Development Centor, Toshiba Corporation
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- Masunishi Kei
- Manufacturing Engineering Center, Toshiba Corporation
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- Ono Daiki
- Corporate Research & Development Centor, Toshiba Corporation
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- Ikehashi Tamio
- Corporate Research & Development Centor, Toshiba Corporation
Bibliographic Information
- Other Title
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- Pd系金属ガラスを用いた高速応答・低消費電力容量型MEMS水素センサに関するレビュー
- Pdケイ キンゾク ガラス オ モチイタ コウソク オウトウ ・ テイショウヒ デンリョク ヨウリョウガタ MEMS スイソ センサ ニ カンスル レビュー
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Abstract
<p>This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.</p>
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 138 (7), 312-318, 2018-07-01
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001288040503552
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- NII Article ID
- 130007387000
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 029123107
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
