Effects of Cleaning Speed of Ultrasonic Cleaning in Microbubble with Surfactant

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  • マイクロバブルと界面活性剤が超音波洗浄の洗浄速度に与える影響

Abstract

<p>In recent years, there is an increasing expectation for quality improvement of electronic products such as precision machines and semiconductor wafers. Further cleaning techniques with higher precision and lower environmental burden are required, so various methods have been proposed. Until now authors have been studying ultrasonic cleaning but found that cleaning with ultrasonic waves has the problem of lowering detergency with long washing depending on frequency. To solve this problem, we attempted to use microbubbles and a surfactant in combination for ultrasonic cleaning. As a result, it became clear that washing can be carried out more efficiently by using a surfactant at low frequency, and it can be cleaned at a high frequency by using microbubbles at the same time without remaining oil amount being constant.</p>

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