163 Dependence of microstructures of distribution of mechanical properties of electroplated gold thin films

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  • Nakoshi Yutaro
    Department of Finemechanics, Graduate School of Engineering, Tohoku Univ.
  • Suzuki Ken
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku Univ.
  • Miura Hideo
    Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku Univ.

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  • 163 めっき金薄膜機械特性分布広がりの微細組織依存性

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