P2-17 X-ray analysis of SAW-semiconductor coupled devices

DOI
  • Nakajima T.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Miyadai K.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Kaneshiro C.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Aoki Y.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Koh K.
    Faculty of Engineering, Kanagawa Institute of Technology
  • Hohkawa K.
    Faculty of Engineering, Kanagawa Institute of Technology

Bibliographic Information

Other Title
  • P2-17 半導体/圧電体結合素子のX線回折によるトポグラフィック評価(ポスターセッション2,ポスター発表)

Journal

Details 詳細情報について

  • CRID
    1390001288093606400
  • NII Article ID
    110007464250
  • DOI
    10.24492/iuse.22.0_205
  • ISSN
    24331414
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles

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