E-4 A piezoelectric rod micro ultrasonic motor with shear-bending modes(Bulk wave devices, High power ultrasound)

Lu Cunyue, Zhou Tieying, Chen Yu, Lu Kai

doi:10.24492/use.26.0_199

E-4 A piezoelectric rod micro ultrasonic motor with shear-bending modes(Bulk wave devices, High power ultrasound)

DOI

Lu Cunyue

Department of Physics, Tsinghua University
Zhou Tieying

Department of Physics, Tsinghua University
Chen Yu

Department of Physics, Tsinghua University
Lu Kai

Department of Physics, Tsinghua University

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説明

This paper proposed a new mechanism for exciting shear-bending vibration in a piezoelectric ceramic rod. A mini-ultrasonic motor prototype with this concept was designed. Both finite element method (FEM) analyses and experimental results demonstrate the concept.