Study on the Optimization of Hybrid fine particles on Chemical Mechanical Polishing of Hard to process materials

DOI

Bibliographic Information

Other Title
  • 難加工材料におけるハイブリッド研磨微粒子の最適構造に関する研究
  • 化学的作用と機械的作用に関する考察
  • Chemical reactivity and Mechanical action

Abstract

<p>We repot on the hybrid fine particles using core silica particles adsorbed on the ultra fine nano particles such as nano silica particles (ca.4nm diameter) and fullerenol for Chemical Mechanical Polishing of Hard to process materials. In our study, chemical reactivity and mechanical action from the hybrid particles were investigated using the several diameters of the core silica particles. At the case of adsorption of the nano silica particles and fullerenol, chemical reactivity become dominant parameter under the small size region although the nano particle is coated on the surface of the core silica particles. These results expect that both parameters as chemical reactivity and mechanical action can be control by the sizes of core particles and coating condition of the nano silica particles. We also optimize the structure of the hybrid silica particles at the case of the nano silica particles and/or fullerenol to meet the high performance CMP of hard to process materials and discuss about these results.</p>

Journal

Keywords

Details

  • CRID
    1390001288124966912
  • NII Article ID
    130007602798
  • DOI
    10.11522/pscjspe.2018a.0_312
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

Report a problem

Back to top