Study on the Optimization of Hybrid fine particles on Chemical Mechanical Polishing of Hard to process materials
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- Suzuki Keisuke
- Kyushu Institute of technology
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- Bun-Athuek Natthaphon
- Kyushu Institute of technology
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- Takazaki Hiroko
- Kyushu Institute of technology
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- Yasunaga Takuo
- Kyushu Institute of technology
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- Yoshimoto Yutaka
- Kyushu Institute of technology
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- Khajornrungruang Panart
- Kyushu Institute of technology
Bibliographic Information
- Other Title
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- 難加工材料におけるハイブリッド研磨微粒子の最適構造に関する研究
- 化学的作用と機械的作用に関する考察
- Chemical reactivity and Mechanical action
Abstract
<p>We repot on the hybrid fine particles using core silica particles adsorbed on the ultra fine nano particles such as nano silica particles (ca.4nm diameter) and fullerenol for Chemical Mechanical Polishing of Hard to process materials. In our study, chemical reactivity and mechanical action from the hybrid particles were investigated using the several diameters of the core silica particles. At the case of adsorption of the nano silica particles and fullerenol, chemical reactivity become dominant parameter under the small size region although the nano particle is coated on the surface of the core silica particles. These results expect that both parameters as chemical reactivity and mechanical action can be control by the sizes of core particles and coating condition of the nano silica particles. We also optimize the structure of the hybrid silica particles at the case of the nano silica particles and/or fullerenol to meet the high performance CMP of hard to process materials and discuss about these results.</p>
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2018A (0), 312-313, 2018-08-20
The Japan Society for Precision Engineering
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Keywords
Details
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- CRID
- 1390001288124966912
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- NII Article ID
- 130007602798
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed