MEMSマイクロホンにおける薄膜の機械的信頼性評価

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タイトル別名
  • Mechanical robustness evaluation method of membrane for MEMS microphone

抄録

<p>High mechanical robustness is required for a membrane of MEMS microphone because of its severe usage environment. This report introduces the two main evaluation methods, a drop test and a compressive air test. The drop test has an advantage of detecting the weakest point directly, while the compressive air test is able to evaluate membrane rapidly and precisely. 7 kinds of MEMS microphones fabricated with different process condition of diaphragm were evaluated by the two methods. Our test results show the diaphragm failure rate in the drop test has a good correlation with the destruction pressure in the compressive air test. Combination of two mechanical reliability evaluation methods contributes to efficient development and quality control of MEMS microphone.</p>

収録刊行物

  • 年次大会

    年次大会 2018 (0), J2230103-, 2018

    一般社団法人 日本機械学会

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