Use of Sputtered Thin Film for Detecting Contacts

DOI

Bibliographic Information

Other Title
  • スパッタ薄膜を用いた微細接触部の検出に関する研究

Abstract

<p>In this study, a technique is proposed to realize the detection of the micro-contacts. The technique for detecting the contacts is based on the principle using transfers between sputtered thin films coated on both of contact surfaces. The micro-contacts between both surfaces of a rough steel ball and a smooth glass flat are observed and measured, using the proposed technique. After indentation, surface images of contacts were measured on the glass surface by an optical microscope and SPM. The result showed that it is found that micro-contacts of less than submicron in lateral size can be clearly detected by using the technique.</p>

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Keywords

Details 詳細情報について

  • CRID
    1390002184876703616
  • NII Article ID
    130007800832
  • DOI
    10.11522/pscjspe.2019a.0_155
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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