窒素／水素混合ガスを用いたプラズマ照射によるＦｅーＣｏ箔の窒化

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  • チッソ/スイソ コンゴウ ガス オ モチイタ プラズマ ショウシャ ニ ヨル Fe-Co ハク ノ チッカ

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This paper tried nitriding of Fe-Co foil plasma irradiation method, and examined from the view of the process to preparation and the crystal structure and magnetic property of the prepared sample. The Fe-Co foil contained Fe49.27％, Co48.8％, V1.93％,thickness 100 µm was used. In this study, we first tried the plasma nitriding treatment in the 70％N2+30％H2 mixed gas atmosphere which was the conventional condition, and it was done in the previous research, but from the measurement result of the X-ray diffraction （XRD） and the magnetic property （VSM）, the preparation of the Fe-Co alloy didn＇t confirmed. Based on this result, we proposed to irradiate Fe-Co foil with nitrogen plasma in 70％N2+30％H2 mixed gas atmosphere after plasma irradiation in Ar gas atmosphere different from the conventional method. The results were summarized as follows. After the Ar plasma irradiation which was the proposed nitriding treatment method, nitriding treatment was successfully performed by plasma irradiation with 70％N2+30％H2 gas, and formation of γ-austenite was observed in addition to the Fe-Co peak. From the XRD result of γ-austenite, it was confirmed that the diffraction peak increased with increasing plasma treatment current and plasma irradiation time. From the results of the magnetic characteristics by the VSM, it was confirmed that the saturation magnetization value decreased and the coercive force increased as the plasma processing current and plasma irradiation time increased.

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  • 静電気学会誌

    静電気学会誌 44 (1), 2-7, 2020

    一般社団法人静電気学会

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