Al/Ni発熱多層膜の自立化が瞬間接合体の強度に及ぼす効果

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  • Effect of free-standing Al/Ni exothermic multilayer film on strength of reactively-soldered Si joints

抄録

<p>In this paper, we challenge to strengthen Al/Ni-reactively-soldered single-crystal Si specimens. Al/Ni multilayer film in which Al and Ni are laminated at nanometer scale can produce NiAl intermetallic compound instantaneously by applying only a small energy, such as a small spark. During the compound formation, exothermic reaction is shown, which can be used to melt SnAg-solder for bonding Si wafers. After the solder bonding, four-point bending test is conducted to experimentally specify the weakest material or interface in the bonded section. By the usage of the free-standing Al/Ni film, the weakest point changed to the Si–interlayer interface from the NiAl–Sn-Ag interface due to a reduction of the number of voids at the solder-NiAl interface. By changing to Sn-Ag solder sheet from deposited Sn-Ag film, crack propagation direction changed. Using free-standing Al/Ni multilayer film and rolled solder sheet is effective for improving the bending strength.</p>

収録刊行物

  • 年次大会

    年次大会 2019 (0), J22318P-, 2019

    一般社団法人 日本機械学会

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