Effects of Atmosphere and Temperature on Microtribology between Silicon Single Crystals

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  • Takagi Makoto
    Department of Mechanical Engineering, Faculty of Engineering, Aichi Institute of Technology
  • Nagae Kosuke
    Graduate School of Engineering, Aichi Institute of Technology
  • Kiuchi Ryosuke
    Graduate School of Engineering, Aichi Institute of Technology
  • Iwata Hiroyuki
    Department of Electrical and Electronics Engineering, Faculty of Engineering, Aichi Institute of Technology
  • Saka Hiroyasu
    Research Institute for Industrial Technology, Aichi Institute of Technology

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  • Si単結晶のマイクロトライボロジーに及ぼす雰囲気と温度の影響
  • Siタンケッショウ ノ マイクロトライボロジー ニ オヨボス フンイキ ト オンド ノ エイキョウ

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<p>Microtribology of silicon single crystals is one of the key technologies from the viewpoint of reliability of practical application in micro electro mechanical system (MEMS). In the study, a silicon single crystal (100) wafer was scratched by a silicon single crystal tip under a very small loading force in various atmospheres and temperatures, which was characterized using an atomic force microscope. In air and water, the silicon single crystal tips were worn greatly. However, the morphology of the scratched wafer surface was quite different; in air the scratched area of the wafer surface was forming a terrace. In vacuum, the tips were worn slightly. In terms of the effects of temperature, the silicon single crystal softened at 473 K was worn. At 673 K, the silicon single crystal wafer was worn greatly and stick-slip like phenomenon occurred between the silicon single crystals significantly softened. As a result, microtribology is affected by atmospheres or temperatures.</p>

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