Fabrication of Periodical Micro-Structure on Metal Surface Using Ultra-Short Laser Pulses

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  • 超短レーザーパルスによる金属表面への微細周期構造の形成
  • チョウタンレーザーパルス ニ ヨル キンゾク ヒョウメン エ ノ ビサイ シュウキ コウゾウ ノ ケイセイ

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Precision machining industry requires practical technology for non-thermal processing. Using green ps laser pulses, we examined periodical micro-fabrication on the Cu plate surface. The diameter of the formed dimple was about 35 μm and around 10 μm depth. We observed no remarkable heat damage, such as discoloration, melting, or re-solidifi cation. The dispersion of the processing size was reduced by avoiding thermal damage. We achieved a processing amount of about 300 dimple/s.

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