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- 中居 倫夫
- 宮城県産業技術総合センター
書誌事項
- タイトル別名
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- Property and Magnetic Domain of Thin Film MI Sensor with Subjecting to Normal Magnetic Field
- ハクマク ジキ インピーダンスセンサ ノ キョウジバ チュウ ニ オケル トクセイ ト ジク ヘンカ
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説明
<p>A thin-film magnetic field sensor is useful for detecting foreign matters and nanoparticles included in industrial and medical products. It can detect a small piece of tool steel chipping or breakage inside the products nondestructively. An inspection of all items in the manufacturing process is desirable for the smart manufacturing system. A previous study proposed a sensing system in which a thin-film magneto-impedance sensor was set in a strong normal magnetic field and detected the foreign matters at the same time as magnetization. In this paper, an impedance property of a thin-film magneto-impedance sensor and magnetic domain of it is investigated within up to 0.35 T normal magnetic fields against substrate plane for the purpose of improving performances of the proposed sensing system. A verification of sensitivity of the sensor was also carried out subjecting to 0.3 T normal magnetic fields.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 140 (12), 343-348, 2020-12-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390004951537473152
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- NII論文ID
- 130007948605
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 030793536
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可