Low-temperature synthesis of group-IV material thin films

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Bibliographic Information

Other Title
  • IV族材料薄膜の低温合成技術
  • Ⅳ族材料薄膜の低温合成技術 : 層交換現象とその応用
  • Ⅳ ゾク ザイリョウ ハクマク ノ テイオン ゴウセイ ギジュツ : ソウ コウカン ゲンショウ ト ソノ オウヨウ
  • Layer exchange and its applications
  • 層交換現象とその応用

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Abstract

<p>Currently, there is a strong demand for technology to fabricate electronic devices wherever you like. The key technology is “low temperature synthesis of functional thin films on insulators”. Group IV materials, such as Si, Ge and C, are environmentally friendly and therefore suitable for the electronic materials around us. This paper focuses on “layer exchange”, which is quite unique among the low-temperature synthesis technologies for Group IV materials. Over 20 years of research on layer exchange and recent prospects, will be briefly introduced, covering from the mechanism of the phenomenon to its application to devices.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 90 (7), 414-418, 2021-07-05

    The Japan Society of Applied Physics

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