微細孔を有する薄膜エレクトロニクスの作製

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  • Development of thin-film electronics with micropores

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New electronics that integrate flexible polymer and metal materials are currently being researched. Particularly, thin-film electronics, which have flexibility derived from their thinness, are used to measure vital information with adapting to complicated biological surfaces. In this study, we researched mechanical properties of thin parylene films with micropores and fabricated gold electrode on its pattern. Firstly, parylene films were deposited on glass substrates, and micropores were fabricated by photolithography and plasma etching on the parylene films. Then, tensile tests were performed on the parylene films to test their mechanical properties. The results showed that the micropores improved the elasticity of the films. Finally, we have successfully wired gold electrodes on the pattern, by peeling off from glass substrate after evaporating gold on the pored parylene. We have confirmed the integrity of the electrodes and deformability of the films with a microscope. It was shown that metallic materials can be used to fabricate electronics without interfering with the flexibility of the base material.

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