TMS及びHMDSOによる中間層の作製とDLC膜の密着性への影響評価

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  • Preparation of intermediate layer by TMS and HMDSO, adhesion strength of DLC films

説明

DLC (Diamond-like carbon) films are characterized by the amorphous structure and exhibit interesting mechanical and tribological properties. The effect of difference in material of intermediate layer on adhesion is not yet fully reported. In this study, TMS (Tetramethylsilane) and HMDSO (Hexamethyldisiloxane) used as intermediate layer. The purpose of the experiment is to clarify the difference in adhesion of DLC films by TMS intermediate layer and HMDSO intermediate layer. First, Intermediate layers were deposited on chromium plating substrates, followed by DLC films were deposited. Intermediate layers and DLC films were deposited by plasma-enhanced chemical vapor deposition (PE-CVD). In the tensile test, the sample with the combination of TMS intermediate layer and DLC films showed higher adhesion strength than the sample with the combination of HMDSO intermediate layer and DLC films. In the ball-on-disk test, the sample with the combination of TMS intermediate layer and DLC films and the sample with the combination of HMDSO intermediate layer and DLC films showed the same tendency as the tensile test.

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