Fabrication of Microneedle by MEMS Technologies

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  • SHIKIDA Mitsuhiro
    Department of Biomedical Information Sciences, Faculty of Information Science, Hiroshima City University
  • HASEGAWA Yoshihiro
    Department of Biomedical Information Sciences, Faculty of Information Science, Hiroshima City University

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  • MEMS技術を用いたマイクロニードルの作製
  • MEMS ギジュツ オ モチイタ マイクロニードル ノ サクセイ

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<p>The fabrication process of the microneedle based on Micro Electro Mechanical Systems (MEMS) technologies was summarized in this review article. Firstly, the Si microneedle was produced by applying the photolithography and the etching processes, and the pyramidal- and the circular cone-shaped microneedles were fabricated by the wet- and dry-etching, respectively. The mechanical grinding process was applied instead of the photolithography to produce the arrayed Si microneedle with high aspect ratio and high density by the wet-etching. The candle-like Si microneedle was produced by applying the multi-steps dry-etching. Recently, the molding process was embedded into the MEMS technologies to transfer the microneedle material. The micro-machined Si needle was used as the master, and its copied microneedle was produced by the mold applying the metal or resin as the materials. Metal female die produced by the arrayed Si microneedle was produced to increase the pyramidal shaped needle density in the case of the mold. The tip-separable microneedles array made of the biodegradable material was proposed by stacking the pyramidal shaped microneedle applying the transdermal drug delivery system.</p>

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