書誌事項
- タイトル別名
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- Characteristics of Helicon Wave Plasmas for Simulation of Plasma-Wall Interaction
- プラズマ カベ ソウゴ サヨウ モギ ジッケン ノ タメノ ヘリコンハ プラズマ ノ トクセイ
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We have also been developing a plasma-wall interaction (PWI) simulator of which plasma source is a steady-state RF helicon wave plasma supply to demonstrate in situ and real-time measurement and to study PWI phenomena. A helical antenna is surrounding a cylindrical quartz tube of which outer diameter is ~5 cm. The antenna is connected to an RF power supply of which power is up to 5kW through a matching box. A set of two coils produces an axial magnetic field of 0.05T at the plasma center. At present, the electron density at the plasma center is up to ~3 x 10^18 m^(-3) and electron temperature is up to ~10eV. Rather high plasma flux density of ~4 x 10^22 m^(-2) s^(-1) to the substrate has been obtained.
収録刊行物
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- 九州大学応用力学研究所所報
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九州大学応用力学研究所所報 134 61-64, 2008-03
九州大学応用力学研究所
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詳細情報 詳細情報について
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- CRID
- 1390009224763244032
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- NII論文ID
- 120001219845
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- NII書誌ID
- AA11459359
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- DOI
- 10.15017/14178
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- HANDLE
- 2324/14178
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- NDL書誌ID
- 9576245
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- ISSN
- 13455664
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- IRDB
- NDL
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用可